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SPAR measures the adsorption of thin films onto silicon wafers by detecting a shift in the polarization of parallel and perpendicular electromagnetic radiation upon reflection. A stagnant flow is used to create a point with no flow towards the surface so that diffusion is dominating (stagnation point). The optics is similar to that of ellipsometry.

Tool name:
SPAR
Area/room:
19-564B
Category:
Surface analysis and related tools
Manufacturer:
Laboratory of Physical Chemistry and Colloidal Sci
Model:
Stagnation Point Adsorption Reflectometry

process details

Instructors

Licensed Users

Fibre and polymer Technology
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